Advance Industrial Polyimide Heaters

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Polyimide Heaters and integrated Assemblies represent a thermal solution for application requiring precision temperature profiles at lower process temperatures. By supplying a thermal assembly that has been optimized for an application, we can assure that part-to-part performance will meet the semiconductor equipment specifications. Polyimide heater solutions are commonly used in wafer testing, dry etch, and other applications.

• Process temperature 200°C (392°F)
• Kapton® or silicone rubber materials
• Moisture and chemical-resistant