Advance Industrial Cast Vacuum Chamber Heaters

Home > Products > Semiconductor Processing > Cast Vacuum Chamber Heaters

Cast Vacuum Chamber Heaters are designed to optimize temperature profile in a vacuum chamber. Uniform process temperature improves etch and deposition rates and uniformity.

• Three dimensional cast aluminum assemblies
• Operating temperature < 450°C (842°F)
• Aluminum alloys 170.1, 319 or 356
• Precision machining of vacuum and other features
• Integral RTD or thermocouple sensors